Scribing and breaking apparatus and system therefor
AssigneeMitsuboshi Diamond Industrial Co., Ltd.
InventorsHiroki UEYAMA, Akira Ejimatani
Life of this patent
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Abstract
A separation apparatus comprising a first and a second scribing means for scribing front and rear surfaces of a first mother substrate made of a brittle material along first predetermined scribing lines previously provided on the front and rear surfaces of the first mother substrate, the first and second scribing means being opposed to each other on an upper side and a lower side, and a holding and transferring means for holding and transferring the first mother substrate so that the first predetermined scribing lines of the first mother substrate are located between the first and second scribing means.
Claims1
A separation apparatus, comprising:
- first and second scribing means for scribing front and rear surfaces, respectively, of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other and being provided on an upper side and a lower side of the mother substrate, respectively;
- and
- first and second rollers for separating the mother substrate along the scribing lines provided by the first and second scribing means, the first roller being provided on an upper side of the mother substrate and rolling on the front surface of the mother substrate to contact and press the front surface of the mother substrate, and the second roller being provided on a lower side of the mother substrate and rolling on the rear surface of the mother substrate to contact and press the rear surface of the mother substrate.
Dependencies are inferred from the claim text.