# US 2009/0065741 A1 · Apparatus and method for the application of a material layer to display devices

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- Number: US 2009/0065741 A1
- Document ID: US20090065741A1
- Status: Published application
- Kind: A1
- Application number: 11/816,494
- Filed: 2006-02-16
- Published: 2009-03-12
- Earliest claimed: 2005-02-18
- Assignees: Applied Multilayers Limited; Cambridge Display Technology Limited
- Inventors: John Michael Walls; Desmond Gibson; William Young; Nalinkumar Patel; Nicoletta Anathassopoulou
- Web page: https://patentgrep.com/patent/US20090065741A1

## CPC

- C23C 14/352: {using more than one target (C23C14/56 takes precedence)}
- C23C 14/0036: {Reactive sputtering}
- C23C 14/086: {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
- H01J 37/3405: {Magnetron sputtering}
- H05B 33/10: Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
- H10K 50/81: Anodes
- H10K 50/828: Transparent cathodes, e.g. comprising thin metal layers
- H10K 71/60: Forming conductive regions or layers, e.g. electrodes
- H10K 2102/103: {comprising indium oxides, e.g. ITO}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

The invention relates to a method and apparatus for the application of material to form a layer of an organic electroluminescent device. The material is sputter deposited typically from at least one target of material held in respect to a magnetron in a coating chamber. The magnetrons used can be unbalanced magnetrons and/or are provided with other magnetrons and/or magnet arrays in a closed field configuration. The material is found to be deposited in a manner which prevents or minimises damage to the device and hence reduces or removes the need for a barrier layer to be applied.

## Claims

### Claim 1

Apparatus for the application of a layer of material by sputter deposition onto an organic electroluminescent device, said device including an electroluminescent layer applied directly or indirectly to a substrate, said apparatus including a holder for the device and on which the device is located in a coating chamber, said coating chamber including at least one target of the material to be deposited onto the device, said target provided as part of an unbalanced magnetron, said coating chamber including at least one other magnetron and/or magnet array and wherein said magnetrons and/or magnet array are mutually located in the coating chamber such that the polarity of the outer or ring magnet of a first magnetron or magnet array is the opposite to the polarity of the outer or ring magnet of at least one magnetron or magnet array adjacent thereto and the material is applied with a material deposition energy in the coating chamber of less than 50 eV.

### Claim 2 (depends on 1)

Apparatus according to claim 1 wherein the closed field configuration includes a series of unbalanced magnetrons.

### Claim 3 (depends on 2)

Apparatus according to claim 2 wherein each of the unbalanced magnetrons is provided with a target of the material which can be selectively applied during the coating process simultaneously or sequentially with material from further targets of material.

### Claim 4 (depends on 1)

Apparatus according to claim 1 wherein the closed field configuration includes at least one magnet array which is not provided for the deposition of material but is magnetically configured and positioned with respect to at least one magnetron in the coating chamber so as to provide said closed field configuration.

### Claim 5 (depends on 1)

Apparatus according to claim 1 wherein the magnetron and/or magnet array configuration allows the retention of the magnetic flux within the coating chamber and hence retains the relatively dense plasma within the coating chamber.

### Claim 6 (depends on 5)

Apparatus according to claim 5 wherein the devices to be coated are positioned within the plasma.

### Claim 7 (depends on 5)

Apparatus according to claim 5 wherein the devices to be coated are positioned adjacent the plasma.

### Claim 8 (depends on 1)

Apparatus according to claim 1 wherein the organic electroluminescent device includes a series of layers and at least one of the layers is applied using apparatus other than that of the closed field configuration.

### Claim 9 (depends on 8)

Apparatus according to claim 8 wherein the apparatus is provided as part of a coating assembly, said assembly including at least one further arrangement for the forming of a further layer on the device.

### Claim 10 (depends on 9)

Apparatus according to claim 9 wherein the further arrangement includes any, or any combination of, an inkjet printer and/or an encapsulator.

### Claim 11 (depends on 10)

Apparatus according to claim 10 wherein the closed field configuration deposition apparatus, inkjet printer and/or encapsulator are provided as part of an integrated coating assembly with movement means provided to move the device through and past the layer forming apparatus.

### Claim 12 (depends on 1)

Apparatus according to claim 1 wherein at least one of the targets of the unbalanced magnetrons is formed of a material to be applied to the devices to form a barrier layer over the electroluminescent layer prior to the application of the material to form a cathode device.

### Claim 13 (depends on 1)

Apparatus according to claim 1 wherein the device onto which the material is to be applied has previously been formed with an anode layer, and an electroluminescent layer and cathode layer is applied thereon either directly or onto a barrier layer covering the electroluminescent layer.

### Claim 14 (depends on 13)

Apparatus according to claim 13 wherein the barrier materials are selected from wide bandgap semi conductors, ZnS, ZnSe, organic materials, and CuPc.

### Claim 15 (depends on 14)

Apparatus according to claim 14 wherein the barrier layer is deposited directly onto the electroluminescent layer.

### Claim 16 (depends on 14)

Apparatus according to claim 14 wherein one or more additional layers are disposed between the electroluminescent layer and the barrier layer.

### Claim 17 (depends on 1)

Apparatus according to claim 1 wherein the material which is applied onto the device is selected from tin oxide or doped zinc oxide.

### Claim 18 (depends on 1)

Apparatus according to claim 1 wherein a plurality of the devices are provided as a batch in the coating chamber to allow the material to be applied thereto.

### Claim 19 (depends on 18)

Apparatus according to claim 18 wherein the devices are mounted in a holder or carrier in a form of a drum or carousel driven to rotate about an axis and located within the unbalanced magnetron closed field.

### Claim 20 (depends on 1)

Apparatus according to claim 1 wherein the holder employs a planetary motion drive arrangement to move the devices within the chamber.

### Claim 21 (depends on 1)

Apparatus according to claim 1 wherein the device is held horizontally on a non rotating or rotating platen.

### Claim 22 (depends on 1)

Apparatus according to claim 1 wherein the devices are transported into the coating chamber by a drive mechanism which allows the devices to move in a linear path to pass through the coating chamber.

### Claim 23 (depends on 1)

Apparatus according to claim 1 wherein control means are provided to allow a suitable gas or gasses to be selectively introduced into the coating chamber.

### Claim 24 (depends on 1)

Apparatus for claim 1 wherein the apparatus includes one or more loading or unloading chambers which are connected to the coating chamber and which can be held selectively at room pressure or in a vacuum.

### Claim 25

Apparatus for the application of a layer of material by sputter deposition onto an organic electroluminescent device, said device including a substrate having an anode layer and an electroluminescent layer applied directly or indirectly thereto, said apparatus including a holder for the device and on which the device is located in a coating chamber, said coating chamber including at least one target of the material to be deposited onto the device, said target provided as part of an unbalanced magnetron, said coating chamber including at least one other magnetron and/or magnet array and wherein said magnetrons and/or magnetic array are mutually located in the coating chamber such that the polarity of the outer or ring magnet of a first magnetron or magnet array is the opposite to the polarity of the outer or ring magnet or at least one magnetron or magnet array adjacent thereto and the layer of material is applied in the coating chamber onto the exposed outer surface of the device formed by the electroluminescent layer or onto a barrier layer overlying said electroluminescent layer.

### Claim 26

Apparatus for the application of a layer of material by sputter deposition onto an organic electroluminescent device, said device including an electroluminescent layer applied directly or indirectly to a substrate, said apparatus including a holder for the device and in which the device is located in a coating chamber, said coating chamber including at least one target of the material to be deposited onto the device, said target provided as part of an unbalanced magnetron, said coating chamber including at least one other magnetron and/or magnet array and wherein said magnetron and/or magnet array are mutually located in the coating chamber such that the polarity of the outer or ring magnets of the first magnetron or magnet array is the opposite to the polarity of the outer or ring magnet of at least one magnetron or magnet array adjacent thereto.

### Claim 27

A method for the application of material to form a layer of an electronic or optoelectronic device, said method including the steps of placing the device to which the material is to be applied in a coating chamber, introducing a gas or gasses into the coating chamber, operating one or a series of unbalanced magnetrons in the coating chamber which may also be used to sputter deposit the said material from at least one material target associated with the unbalanced magnetron in a directed manner onto the device.

### Claim 28 (depends on 27)

A method according to claim 27 wherein the magnetrons and/or magnet arrays are arranged such that the polarity of the outer or ring magnet of a first magnetron or magnet array is the opposite of the polarity of the outer or ring magnet of at least one magnetron or magnet array adjacent thereto.

### Claim 29 (depends on 27)

A method according to claim 27 wherein the material is applied with no bias voltage applied to the substrates during deposition of the material.

### Claim 30 (depends on 27)

A method according to claim 27 wherein the substrates achieve a floating potential within the chamber.

### Claim 31 (depends on 30)

A method according to claim 30 wherein the floating potential is less than 50 volts and the material deposition energy is less than 50 eV.

### Claim 32 (depends on 27)

A method according to claim 27 wherein an inert gas is introduced into the chamber and the inert gas is retained substantially within a field generated by the magnetron and/or magnet array.

### Claim 33

An OLED device having a layer of electroluminescent polymer onto which is applied directly or indirectly, a layer of material, said material applied using a closed field unbalanced magnetron method.

### Claim 34

A method of forming an electrode for an electronic or opto electronic device, said method including the sputter deposition of a material from at least one target to form an electrode layer in a closed field magnetron and/or magnet array configuration in a coating chamber.

### Claim 35

A method of depositing material to form a layer as part of an electronic or optoelectronic device, said method allowing the deposition of material from a magnetron target and including the steps of generating a plasma in a coating chamber and contacting a substrate of the device with the plasma which is generated to form a layer of the material on the substrate.

### Claim 36 (depends on 35)

A method according to claim 35 wherein the substrate is passed through the plasma to contact the same.

### Claim 37 (depends on 35)

A method according to claim 35 wherein the plasma is located within a field generated by a magnetron and/or magnet array.

### Claim 38

A method for depositing a layer of material onto an electronic device to form a layer which in use of the device acts as an electrode, said method including the steps of placing the device into a coating chamber having at least one target for the material to be deposited, providing the target as part of a magnetron in the coating chamber and operating the magnetron as part of a closed field configuration to sputter deposit material onto the device to form the layer.

### Claim 39

A method for the application of material to form a layer of an electronic or optoelectronic device, said method including the steps of placing a substrate to which the material is to be applied in a coating chamber, introducing a gas or gasses into the coating chamber and operating a magnetron and/or magnet array in the coating chamber to sputter deposit the said material from at least one material target associated with the magnetron and/or magnet array, wherein the magnetron and/or magnet array are arranged such that the polarity of an outer magnet of a first magnetron and/or magnet array is the opposite of the polarity of the outer magnet of at least one magnetron or magnet array adjacent thereto.

### Claim 40 (depends on 39)

A method according to claim 39 wherein the magnetron and/or magnet array comprises at least one unbalanced magnetron.

### Claim 41 (depends on 27)

A method according to claim 27 wherein the layer formed from the material functions as an electrode in the electronic or optoelectronic device.

### Claim 42 (depends on 39)

A method according to claim 39 wherein a layer of material is first applied to form a barrier layer on the substrate.

### Claim 43 (depends on 39)

A method according to claim 39 wherein a barrier layer is first applied to the substrate of the device prior to the subsequent layer of material and the barrier layer is applied with no or minimum oxygen or equivalent gas or plasma present in the coating chamber.

### Claim 44 (depends on 43)

A method according to claim 43 wherein once the barrier layer has reached a desired thickness, oxygen or an equivalent gas is introduced and/or a plasma is created in the coating chamber to control the electrical properties of the layer of material which is subsequently applied.

### Claim 45 (depends on 35)

A method according to claim 35 wherein the layer formed from the material functions as an electrode in the electronic or optoelectronic device.

### Claim 46 (depends on 39)

A method according to claim 39 wherein the layer formed from the material functions as an electrode in the electronic or optoelectronic device.