Fabrication method for carbon fiber, carbon fiber electron source, and field emission display device
AssigneeRohm Co., Ltd.
InventorTomohiro Kato
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AssigneeRohm Co., Ltd.
InventorTomohiro Kato
Estimating the term…
A fabrication method for carbon fiber which can prevent abnormal growth from electrode wiring metal, and can be formed a carbon nano-tube with high-density and uniform, by a simple and cheap method and the fabrication method includes process steps: forming a cathode electrode on a substrate; forming a first insulating film on the cathode electrode; forming a gate electrode on the first insulating film; forming a hole which reaches to the cathode electrode surface into the first insulating film; forming a catalyst crystallite nucleus on a bottom of the hole; oxidized forming a second insulating film on the gate electrode surface; and forming a carbon nano-tube on the catalyst crystallite nucleus; a carbon fiber electron source of high-output current density; and FED device which has high-intensity and large capacity with high current density, are provided.
A fabrication method for carbon fiber comprising:
A fabrication method for carbon fiber comprising:
A fabrication method for carbon fiber comprising:
A carbon fiber electron source comprising:
A field emission display device comprising:
Dependencies are inferred from the claim text.