Method and device for controlling and monitoring a position of a holding element

A device for controlling and monitoring a position of a holding element, comprising:

• a first coordinate system for a current physical position for the holding element and a second coordinate system for a corresponding position of the holding element, the corresponding position corresponding in the second coordinate system to the current physical position in the first coordinate system;
• a position device that provides at least one first position in said second coordinate system as a reference point, wherein said first position is provided by a reference object, and wherein said holding element takes a first physical position in said first coordinate system in said first position;
• an error map device that provides at least one error map using said at least one first position, said at least one error map including a deviation of at least one second physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system;
• a correction map device that provides at least one correction map using said at least one error map, wherein said at least one correction map includes a deviation of at least one third physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system, and wherein said at least one correction map provides a non-linear coordinate translation between said first coordinate system and said second coordinate system;
• and
• at least one of:
• a movement device that moves said holding element to said third physical position in said first coordinate system corresponding to said corresponding position as a desired position in said second coordinate system according to said correction map;
• and
• a reporting device that reports said corresponding position in said second coordinate system corresponding to said third physical position in said first coordinate system using said at least one correction map.

A beam device, comprising:

• a beam generator that generates a beam;
• an objective lens that focuses the beam on a sample to be examined being held by a holding element;
• and
• a device for controlling and monitoring a position of said holding element, wherein the device for controlling and monitoring includes:
• a first coordinate system for a current physical position for the holding element and a second coordinate system for a corresponding position of the holding element, the corresponding position corresponding in the second coordinate system to the current physical position in the first coordinate system;
• a position device that provides at least one first position in said second coordinate system as a reference point, wherein said first position is provided by a reference object, and wherein said holding element takes a first physical position in said first coordinate system in said first position;
• an error map device that provides at least one error map using said at least one first position, said at least one error map including a deviation of at least one second physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system;
• a correction map device that provides at least one correction map using said at least one error map, wherein said at least one correction map includes a deviation of at least one third physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system, and wherein said at least one correction map provides a non-linear coordinate translation between said first coordinate system and said second coordinate system;
• and
• at least one of:
• a movement device that moves said holding element to said third physical position in said first coordinate system corresponding to said corresponding position as a desired position in said second coordinate system according to said correction map;
• and
• a reporting device that reports said corresponding position in said second coordinate system corresponding to said third physical position in said first coordinate system using said at least one correction map.

A computer-readable medium storing executable code that controls and monitors a position of a holding element, the computer-readable medium comprising:

• executable code that provides a first coordinate system for a current physical position of the holding element and a second coordinate system for a corresponding position of the holding element, the corresponding position corresponding in the second coordinate system to the current physical position in the first coordinate system;
• executable code that provides at least one first position in said second coordinate system as a reference point, wherein said first position is provided by a reference object, and wherein said holding element takes a first physical position in said first coordinate system in said first position;
• executable code that provides at least one error map using said at least one first position, said at least one error map including a deviation of at least one second physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system;
• executable code that provides at least one correction map using said at least one error map, wherein said at least one correction map includes a deviation of at least one third physical position of said holding element in said first coordinate system from a corresponding position of said holding element in said second coordinate system, and wherein said at least one correction map provides a non-linear coordinate translation between said first coordinate system and said second coordinate system;
• and
• at least one of:
• executable code that moves said holding element to said third physical position in said first coordinate system corresponding to said corresponding position as a desired position in said second coordinate system according to said at least one correction map;
• and
• executable code that reports said corresponding position in said second coordinate system corresponding to said third physical position in said first coordinate system using said at least one correction map.