Method of preparing organometallic compounds
AssigneeRohm and Haas Company
InventorsFrancis Joseph Lipiecki, Stephen G. Maroldo, Deodatta Vinayak Shenai-Khatkhate, Robert A. Ware
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Abstract
A method of preparing an ultra-pure organometallic compound comprising using a microchannel device for synthesis in reacting a metal halide with an alkylating agent to produce an ultra-pure alkylmetal compound for processes such as chemical vapor deposition.
Claims12
A process for preparing organometallic compounds of ultra-high purity comprising:
- reacting a metal salt and an alkylating agent in a microchannel device to yield an organometallic compound wherein the resulting compound has the minimum purity required for chemical vapor deposition processes.
A method of preparing an organometallic compound of ultra-high purity comprising purifying an organometallic compound comprising impurities in a microchannel device to reduce the level of impurities with relative volativity (a) between 0.8<α<1.5 to a level useful in electronic materials applications.
Dependencies are inferred from the claim text.