Fluorine-containing elastomer composition
AssigneeDaikin Industries, Ltd.
InventorsHiroyuki Tanaka, Kouji Fukuyama
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Abstract
The present invention provides a fluorine-containing elastomer composition which has small weight change for all the treatments of NF3 plasma, O2 plasma and CF4 plasma conducted in a manufacturing process of a semiconductor and significant plasma resistance, and a molded article comprising the fluorine-containing elastomer composition.
Claims7
A fluorine-containing elastomer composition comprising a fluorine-containing elastomer and a carbon allotrope (except for amorphous carbon) having an average primary particle size of at most 0.1 μm.
A filler for a sealing material in a semiconductor manufacturing equipment comprising a carbon allotrope (except for amorphous carbon) having an average primary particle size of at most 0.1 μm.
Dependencies are inferred from the claim text.