Programmable mask for fabricating biomolecule array or polymer array, apparatus for fabricating biomolecule array or polymer array including the programmable mask, and method of fabricating biomolecule array or polymer array using the programmable mask and photochemical synthesis apparatus

An apparatus for fabricating a biomolecule array or polymer array comprising:

• a UV light generator including a UV light source and a lens unit through which UV light irradiated from the UV light source passes;
• a programmable mask for fabricating a biomolecule or polymer;
• wherein the programmable mask comprises:
• a first substrate disposed so as to be spaced apart from the UV light generator, the first substrate including a black matrix having openings for incident UV light and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin transistors;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according electric signals of the thin film transistors so as to selectively transmit light;
• a first polarizing plate laminated on one side of the first substrate to polarize UV light;
• a second polarizing plate laminated on one side of the second substrate to polarize UV light;
• and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions;
• and
• an array forming chamber forming a biomolecule array or polymer array, wherein the array forming chamber is laminated on the programmable mask and includes a sample plate on which the biomolecule or polymer array is formed, and a washing solution and a biomolecule or polymer flow in and out of the array forming layer.

A programmable mask for fabricating a biomolecule array or polymer array comprising:

• a first substrate including a black matrix having openings and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light;
• a first polarizing plate laminated on one side of the first substrate to polarize UV light;
• and
• a second polarizing plate laminated on one side of the second substrate including a polarizing layer and a biomolecule or polymer fixed layer.

An apparatus for fabricating a biomolecule array or polymer array comprising:

• a UV light generator including a UV light source and a lens unit through which UV light irradiated from the UV light source passes;
• a programmable mask for fabricating a biomolecule or polymer;
• wherein the programmable mask comprises:
• a first substrate disposed so as to be spaced apart from the UV light generator, the first substrate including a black matrix having openings and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin transistors;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light;
• a first polarizing plate laminated on one side of the first substrate to polarize UV light;
• and a second polarizing plate laminated on one side of the second substrate to polarize UV light including a polarizing layer and a biomolecule or polymer fixed layer;
• and
• an array forming chamber forming a biomolecule array or polymer array, wherein the array forming chamber is disposed on the lower part of the second polarizing plate, and a washing solution and a biomolecule or polymer flow in and out of the array forming layer.

An apparatus for fabricating a biomolecule array or polymer array comprising:

• a UV light generator including a UV light source and a lens unit, wherein UV light irradiated from the UV light source is passed through the lens unit;
• a programmable mask;
• wherein the programmable mask comprises:
• a first substrate disposed so as to be spaced apart from the UV light generator to have a predetermined angle with a propagation path of UV light generated by the UV light generator, the first substrate including a black matrix having openings and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals, second pixel electrodes connected to drain electrodes of the thin transistors, and reflection layers for reflecting incident UV;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light;
• and
• an array forming chamber forming a biomolecule array or polymer array, wherein the array forming chamber is spaced apart from the programmable mask to have a right angle to the UV light path reflected from the programmable mask and includes a sample plate on which the biomolecule or polymer array is formed, and a washing solution and a biomolecule or polymer flow in and out of the array forming layer.

A method of fabricating a biomolecule array or polymer array using a programmable mask for fabricating a biomolecule array or polymer array, wherein the programmable mask comprises:

• a first substrate including a black matrix having openings and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light;
• a first polarizing plate laminated on one side of the first substrate;
• a second polarizing plate laminated on one side of the second substrate;
• and a lens array layer laminated on one side of the second polarizing plate including lenses which correspond to the pixel regions, the method comprising:
• irradiating UV light to selective regions of a sample plate on which molecules having a protecting group are fixed through the programmable mask;
• and
• flowing a solution containing biomolecule or polymer monomer, required to fix to the molecule.

A method of fabricating a biomolecule array or polymer array using a programmable mask for fabricating a biomolecule array or polymer array, wherein the programmable mask comprises:

• a first substrate including a black matrix having openings and first pixel electrodes;
• a second substrate including thin film transistors for switching pixel regions which correspond to the openings according to applied electric signals and second pixel electrodes connected to drain electrodes of the thin film transistors;
• a liquid crystal layer interposed between the first substrate and the second substrate, the liquid crystal layer including liquid crystal whose arrangement can be changed according to electric signals of the thin film transistors so as to selectively transmit light;
• a first polarizing plate laminated on one side of the first substrate;
• and a second polarizing plate laminated on one side of the second substrate including a polarizing layer and a biomolecule or polymer fixed layer, the method comprising:
• irradiating UV light to selective regions of a sample plate on which molecules having a protecting group are fixed through the programmable mask;
• and
• flowing a solution containing biomolecule or polymer monomer, required to fix to the molecule.

A photochemical synthesis apparatus for selectively forming source materials in a predetermined region on a substrate, the apparatus comprising:

• a reaction chamber onto which the substrate is loaded and into which reaction molecules forming the source materials are supplied;
• a light source providing reaction light, the light source being disposed above the substrate;
• and
• a transmission region controller variably controlling regions through which the reaction light can be transmitted to the substrate, the transmission region controller being disposed between the light source and the substrate,
• wherein the reaction light comprises laser light having a high degree of coherence.

A photochemical synthesis apparatus for selectively forming source materials in a predetermined region on a substrate, the apparatus comprising:

• at least one light source generating reaction light;
• a plurality of reaction chambers onto which a plurality of substrates are respectively loaded;
• a reaction light controller guiding the reaction light to the substrates;
• and
• a transmission region controller variably controlling regions through which the reaction light can be transmitted to the substrates, the transmission region controller being disposed between the reaction light controller and the substrates,
• wherein the reaction light controller comprises a plurality of optical splitters splitting the reaction light so as to be provided to the plurality of substrates.