Electron source manufacturing method
AssigneeDenki Kagaku Kogyo Kabushiki Kaisha
InventorsSeiichi Sakawa, Yoshinori Terui
Life of this patent
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Abstract
An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost A process for producing an electron source having an electron emitting portion at one end of a rod which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.
Claims7
A process for producing an electron source having an electron emitting portion at one end of a rod, which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.
A process for producing an electron source, which comprises forming a conical portion to constitute an electron emitting portion at one end of a rod by machining, removing a damaged layer of the conical portion by chemical polishing or electrolytic polishing then forming a flat portion at the apex of the conical portion by machining, and removing a damaged layer of the flat portion by chemical polishing or electrolytic polishing.
Dependencies are inferred from the claim text.