Light emitting device processes

A method of forming light emitting devices comprising:

• providing a submount supporting a plurality of multi-layer stacks comprising a sacrificial layer and a light-generating region, the light-generating region between a p-type layer and a n-type layer, wherein the multi-layer stacks have substrate portions disposed thereover;
• at least partially decomposing the sacrificial layer of the multi-layer stacks on an individual basis;
• separating the multi-layer stacks from the substrate portions to expose surfaces of the multi-layer stacks, wherein the n-type layers of the multi-layer stacks are closer to the exposed surfaces than the p-type layers;
• and
• forming light emitting devices from the multi-layer stacks.