Transparent Conductive Oxide Films Having Enhanced Electron Concentration/Mobility, and Method of Making Same
OwnerDavid A. Russo, Jeffery L. Stricker +4inventors
InventorsDavid A. Russo, Jeffery L. Stricker, Ryan C. Smith, Thomas D. Culp, Roman Y. Korotkov, Gary S. Silverman
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Abstract
A variety of new n-type TCO films including films with dopants having ionic sizes that approximate those of the metal oxide host material, films with stabilized rutile MO2, and films with AxMOy. The films are deposited by APCVD.
Claims18
A transparent conductive oxide film comprising a doped metal oxide, wherein the ionic size of at least one dopant in the doped metal oxide approximates the size of the host ions in an oxide lattice in the doped metal oxide.
A transparent conductive oxide film comprising a rutile metal oxide MO2, wherein M is selected from the group consisting of Ti, V, Cr, Mo, Ru, and mixtures thereof.
A transparent conductive oxide film comprising a metal oxide AxMOy wherein A is selected from the group consisting of H, Li, Na, and K, x=0-2, and M is either W or Mo.
A method of depositing a metal oxide film by atmospheric pressure chemical vapor deposition on a substrate, comprising the step of exposing the heated substrate to a vapor including at least one dopant having an ionic size that approximates a size of host ions in an oxide lattice in the metal oxide.
A method of depositing a metal oxide film by atmospheric pressure chemical vapor deposition on a substrate, comprising the step of exposing the heated substrate to a vapor containing chemical precursors to deposit at least one metal oxide wherein said metal oxide is rutile MO2, and M is selected from the group consisting of Ti, V, Cr, Mo, Ru and mixtures thereof.
A method of depositing metal oxide films by atmospheric pressure chemical vapor deposition on a substrate, comprising the step of exposing the heated substrate to a vapor containing chemical precursors to deposit at least one metal oxide, wherein said metal oxide is AxMOy wherein A is selected from the group consisting of H, Li, Na, and K, x=0-2, and M is either W or Mo.
Dependencies are inferred from the claim text.