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AssigneeDraka Comteq B.V.
InventorsMattheus Jacobus Van Stralen, Johannes Antoon Hartsuiker, Antonius Henricus Johannes Linders Molthoff, Igor Milicevic
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The present invention relates to an apparatus for carrying out a PCVD process in which one or more doped or undoped glass layers are coated onto the interior of a glass substrate tube. The apparatus comprises an applicator having an inner wall and an outer wall and a microwave guide that opens into the applicator. The applicator extends around a cylindrical axis and which is provided with a passage adjacent to the inner wall, through which the microwaves supplied via the microwave guide can exit, over which cylindrical axis the substrate tube can be positioned, while the applicator is fully surrounded by a furnace that extends over the cylindrical axis.
An apparatus for carrying out a PCVD process in which one or more doped or undoped glass layers are deposited onto the interior of a glass substrate tube having a supply side and a discharge side, the apparatus comprising an applicator having an inner wall and an outer wall and a microwave guide for guiding microwaves, wherein the microwave guide opens into the applicator, with the applicator extending around a cylindrical axis and being provided with a passage adjacent to the applicator's inner wall, through which microwaves supplied via the microwave guide can exit, the glass substrate tube being positionable over the cylindrical axis, the applicator being surrounded by a furnace that extends over the cylindrical axis, wherein the applicator is movable during PCVD along the cylindrical axis between a point of reversal located at the glass substrate tube's supply side and a point of reversal located at the glass substrate tube's discharge side, wherein the furnace is reciprocally movable during PCVD with respect to the glass substrate tube along the longitudinal axis thereof.
Dependencies are inferred from the claim text.