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OwnerShuichi Kanno, Shin Tamata +3inventors
InventorsShuichi Kanno, Shin Tamata, Shinichi Ichikawa, Terufumi Kawasaki, Hisao Yamashita
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An object of the present invention is to improve the decomposition at low temperatures of perfluorocompounds containing only fluorine as a halogen, such as CF4, C2F6 and the like. In the present invention, a perfluorocompound containing only fluorine as a halogen is brought into contact with a catalyst comprising Al, Ni and W as catalytically active ingredients and comprising a mixed oxide or complex oxide of Ni and Al and a mixed oxide or complex oxide of W and Ni, in the presence of steam or a combination of steam and air at a temperature of 500 to 800° C. to convert the fluorine in the perfluorocompound to hydrogen fluoride. Employment of the catalyst of the present invention improves the decomposition at low temperatures and hence makes it possible to decompose the perfluoro-compound at a high percentage of decomposition at a lower temperature.
A method for decomposing a perfluorocompound comprising bringing a gas flow containing a perfluorocompound containing only fluorine as a halogen, into contact with a catalyst comprising Ni, W and Al as catalytically active ingredients and comprising a mixed oxide or complex oxide of Ni and Al and a mixed oxide or complex oxide of Ni and W, in the presence of steam or a combination of steam and air at a temperature of 500 to 800° C. to convert the fluorine in said perfluorocompound to hydrogen fluoride.
A catalyst for decomposing a perfluorocompound containing only fluorine as a halogen by reacting it with steam or a combination of steam and oxygen, which comprises Ni, W and Al as catalytically active ingredients and comprises a mixed oxide or complex oxide of Ni and Al and a mixed oxide or complex oxide of Ni and W.
A process for preparing a catalyst for decomposing a perfluorocompound which comprises adding an aqueous solution containing a material for nickel oxide to powder of a material for Al2O3, calcining the resulting mixture, adding thereto an aqueous solution containing a material for tungsten, and then calcining the resulting mixture to obtain a catalyst comprising a mixed oxide or complex oxide of Ni and Al and a mixed oxide or complex oxide of Ni and W.
Dependencies are inferred from the claim text.