Ternary aluminum alloy films and targets for manufacturing flat panel displays
AssigneePraxair Technology, Inc.
InventorsJaydeep Sarkar, Chi-Fung Lo, Paul S. Gilman
Life of this patent
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Abstract
A physical vapor deposition target for the manufacturing of flat panel displays is provided. The target includes a ternary alloy system having, by atom percent, a first component in an amount of about 90 to 99.98, wherein the first component is aluminum, a second component in an amount of about 0.01 to 2.0, wherein the second component is a rare earth element is selected from the group consisting of Nd, Ce, Dy and Gd, and a third component in an amount of about 0.01 to 8.0, wherein the third element is selected from the group consisting of Ni, Co, Mo, Sc, and Hf.
Claims17
A physical vapor deposition target for the manufacturing of flat panel displays, comprising:
- a ternary alloy system comprising, by atom percent, a first component in an amount of about 90 to 99.98, wherein the first component is aluminum, a second component in an amount of about 0.01 to 2.0, wherein the second component is a rare earth element is selected from the group consisting of Nd, Ce, Dy and Gd, and a third component in an amount of about 0.01 to 8.0, wherein the third element is selected from the group consisting of Ni, Co, Mo, Sc, and Hf.
A method of forming a ternary alloy physical vapor deposition target for the manufacturing of flat panel displays, comprising:
- (a) vacuum melting and casting the ternary alloy into an ingot, the ingot comprising, by atom percent, a first component in an amount of about 90 to 99.98, wherein the first component is aluminum, a second component in an amount of about 0.01 to 2.0, wherein the second component is a rare earth element is selected from the group consisting of Ce, Dy and Gd, and a third component in an amount of about 0.01 to 8.0, wherein the third element is selected from the group consisting of Ni, Co, Mo, Sc, and Hf;
- (b) hot working the ingot at a temperature between about 450-675° C.;
- (c) cold rolling the target blank and reducing the thickness of the blank between 65 percent and to 85 percent to form the target.
A ternary alloy film deposited on a glass substrate, comprising:
- a first component in an amount of about 90 to 99.98 by atom percent, wherein the first component is aluminum, a second component in an amount of about 0.01 to 2.0 weight atom percent, wherein the second component is a rare earth element is selected from the group consisting of Ce, Dy and Gd, and a third component in an amount of about 0.01 to 8.0 weight atom percent, wherein the third element is selected from the group consisting of Ni, Co, Mo, Sc, and Hf.
A physical vapor deposition target for the manufacturing of flat panel displays, comprising:
- a ternary alloy system comprising, by atom percent, a first component in an amount of about 96 to 99.98, wherein the first component is aluminum, a second rare earth component in an amount of about 0.01 to 2.0, wherein the second component is Nd, and a third component in an amount of about 0.01 to 2.0, wherein the third element is a rare earth element selected from the group consisting of Ce, Dy and Gd.
A ternary alloy film deposited on a glass substrate, comprising:
- a first component in an amount of about 96 to 99.98, wherein the first component is aluminum, a second rare earth component in an amount of about 0.01 to 2.0, wherein the second component is Nd, and a third component in an amount of about 0.01 to 2.0, wherein the third element is a rare earth element selected from the group consisting of Ce, Dy and Gd.
Dependencies are inferred from the claim text.