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US 2009/0022572 A1Published application
Cluster tool with a linear source
OwnerThomas Pass, Hsin-Chiao Luaninventors
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Abstract
Systems and methods combining a cluster chamber with linear sources are described. A plurality of wafers is mounted on a pallet. A central robot in a cluster chamber moves the pallet among chambers connected to the cluster chamber chamber. At least one of the chambers connected to the cluster chamber includes a linear deposition source, the pallet moveable relative to the linear deposition source.
Claims30
A method comprising:
- receiving a plurality of wafers in a first chamber of a cluster tool;
- and
- moving the plurality of wafers under a linear source in the first chamber of the cluster tool.
A system comprising:
- a first chamber having a linear source and a carrier to move a plurality of wafers under the linear source;
- a second chamber;
- and
- a cluster chamber connecting the first chamber with the second chamber, the cluster chamber having a robot to transfer the plurality of wafers between the first chamber and the second chamber.
1 more element
A system comprising:
- a first chamber having a linear source and transport rails to move a pallet having a plurality of wafers under the linear source;
- a second chamber;
- and
- a cluster chamber connecting the first chamber with the second chamber, the cluster chamber having a robot to transfer the pallet between the first chamber and the second chamber.
1 more element
A cluster tool comprising:
- a plurality of chambers, at least one of the plurality of chambers having a linear source and being configured to receive a pallet of wafers, the pallet of wafers moveable relative to the linear source.
Dependencies are inferred from the claim text.