Phase change material containing carbon, memory device including the phase change material, and method of operating the memory device
AssigneeSamsung Electronics Co., Ltd.
InventorsYoun-seon Kang, Dong-seok Suh
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Abstract
Provided are a phase change material containing carbon (C), a memory device including the phase change material, and a method of operating the memory device. The phase change material contains a main compound and an additive, wherein the main compound is In—Sb—Te and the additive includes carbon (C). A content a of the carbon (C) may be 0.005≦a≦0.30 atomic (at) %. The additive may further contain nitrogen (N), oxygen (O), boron (B), or a transition metal. The additive may include carbide instead of the carbon (C).
Claims20
A phase change material containing a main compound and an additive, wherein the main compound is indium-antimony-tellurium (IST) and the additive comprises carbon (C).
A memory device comprising a switching device and a storage node connected to the switching device, wherein the storage node comprises a phase change layer comprising an indium-antimony-tellurium (IST) layer and an additive for maintaining the IST layer to be a single phase.
Dependencies are inferred from the claim text.