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AssigneeCarl Zeiss SMT GmbH
InventorsWilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
Estimating the term…
An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
An optical component, comprising at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element.
An optical component, comprising at least one optical element, which heats up during operation due to irradiation with light, and at least one mount for the at least one optical element, the mount being assigned a temperature control device which controls the temperature TF at least of part of the mount to a temperature TF,opt at which a heating-induced expansion of the optical element during operation results in the least deformation of the optical element.
An optical component, comprising at least one optical element, which heats up during operation due to irradiation with light, and with at least one mount for the at least one optical element, the optical element being assigned a temperature control device which controls the temperature T at least of part of the optical element to a temperature To which corresponds at least approximately to the operating temperature of the optical element during optical operation, so that the temperature of the optical element does not change substantially during operation.
A method for optimizing the thermal behavior of an optical component which has at least one optical element, which heats up during operation due to irradiation with light, and at least one mount for the at least one optical element, the temperature TF at least of part of the mount being controlled to a temperature TF,opt at which a heating-induced expansion of the optical element during operation results in the least deformation of the optical element.
A method for optimizing the thermal behavior of an optical component which has at least one optical element, which heats up during operation due to irradiation with light, and at least one mount for the at least one optical element, the temperature T at least of part of the optical element being controlled to a temperature To which corresponds at least approximately to the operating temperature of the optical element during optical operation, so that the temperature of the optical element does not change substantially during operation.
Dependencies are inferred from the claim text.