Electrostatic Holding Apparatus, Vacuum Environmental Apparatus Using it and Joining Apparatus
AssigneeTsukuba Seiko Ltd.
InventorFow-Lai Poh
Life of this patent
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Abstract
An electrostatic holding apparatus is configured to electrostatically hold objects (W1, W2) to be held by applying a predetermined high voltage to a plurality of electrode groups (112a, 112b) as a holding part. A high-voltage generating part or high voltage generating source (114) to convert from a low voltage to a predetermined high voltage necessary to hold the objects electrostatically is disposed on each of electrode modules (110). The high-voltage generating part (114) is hermetically closed or sealed. The high-voltage generating part may include a voltage amplifying circuit. The high-voltage generating part may include a battery and a voltage amplifying circuit.
Claims4
An electrostatic holding apparatus, comprising:
- a plurality of electrode modules, each of which including a holding surface and configured to electrostatically hold an object on the holding surface;
- and
- a high-voltage generating part provided on each of the plurality of electrode modules and configured to convert from a low voltage to a predetermined high voltage necessary to hold electrostatically the object,
- the high-voltage generating part being hermetically sealed.
Dependencies are inferred from the claim text.