Movable device
AssigneeFujitsu Limited
InventorShunji Nakamura
Life of this patent
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Abstract
A movable device simultaneously enabling reduction of size down to the submicron level, higher speed operation, a streamlined production process, low costs, and greater reliability. A movable device provided with bottom electrodes and a basic conductive layer fixed to a substrate, an elastic shaft of a carbon nanotube with a bottom end fixed on the basic conductive layer and standing up, and a top structure including a top electrode spaced away from the bottom electrode and fixed to a top end of the elastic shaft, wherein when applying voltage between a bottom electrode and the top electrode, the top electrode displaces relatively to the bottom electrodes within an allowable range of elastic deformation of the elastic shaft.
Claims20
A movable device provided with bottom electrodes and a basic conductive layer fixed to a substrate, an elastic shaft of a carbon nanotube with a bottom end fixed on said basic conductive layer and standing up, and a top structure including a top electrode spaced away from said bottom electrode and fixed to a top end of said elastic shaft, wherein when applying voltage between a said bottom electrode and said top electrode, said top electrode displaces relatively to said bottom electrodes within an allowable range of elastic deformation of said elastic shaft.
A movable device provided with bottom electrodes and a basic conductive layer fixed to a substrate, an elastic shaft of a carbon nanotube with a bottom end fixed on said basic conductive layer and standing up, and a top structure including a top electrode spaced away from said bottom electrode and fixed to a top end of said elastic shaft, wherein when said top structure displaces relative to said bottom electrode in an allowable range of elastic deformation of said carbon nanotube, acceleration at that time is output as a change of electrostatic capacity between the two electrodes due to said displacement to thereby form an acceleration sensor.
A movable device provided with bottom electrodes and a basic conductive layer fixed to a substrate, an elastic shaft of a carbon nanotube with a bottom end fixed on said basic conductive layer and standing up, and a top structure including a top electrode spaced away from said bottom electrode and fixed to a top end of said elastic shaft, wherein an external mass applied to said top electrode is output as a change of resonance frequency of vibrational displacement of said top electrode with respect to said bottom electrode in an allowable range of elastic deformation of said carbon nanotube to thereby form a mass sensor.
Dependencies are inferred from the claim text.