Electric field read/write head, method of manufacturing the same, and information storage device comprising the electric field read/write head

A method of manufacturing an electric field read/write head, the method comprising:

• preparing a substrate including a device isolation layer which defines an active region;
• doping conductive impurities into the active region in a low density;
• forming a stacked structure including an insulating layer and a write electrode, which crosses a center part of the active region on the substrate;
• doping conductive impurities into the active region disposed on both sides of the stacked structure in a high density to form a source and a drain and defining a resistance region which is a low density doped region between the source and the drain;
• and
• polishing a surface of the substrate facing a recording medium to remove a part of the resistance region.

An information storage device comprising:

• a recording medium comprising a ferroelectric recording layer;
• and an electric field read/write head,
• wherein the electric field read/write head comprises:
• a resistance region formed in a substrate which comprises an end surface facing a recording medium;
• a source formed in the substrate and disposed on a first side of the resistance region;
• a drain formed in the substrate and disposed on a second side of the resistance region;
• and
• an insulating layer and a write electrode formed sequentially on the resistance region,
• wherein a length (l) to width (w) ratio (l/w) of the resistance region satisfies (l/w)≧0.2.