Production method for magnetic recording medium
AssigneeShowa Denko K.K.
InventorMasato Fukushima
Life of this patent
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Abstract
A production method for a magnetic recording medium including forming thin films on a substrate using a sputtering method with a target, wherein the target on which an annular-shaped erosion area is formed during sputtering and a substrate holder on which a plurality of substrates are mounted are installed, opposed in parallel, in a manner such that center axes of the target and the substrate holder align with each other, and the substrates are mounted on the substrate holder in positions such that R3/R1 is 1.1 or smaller and R4 is R2 or greater to form thin films.
Claims18
A production method for a magnetic recording medium comprising:
- forming thin films on a substrate using a sputtering method with a target,
- wherein the target on which an annular-shaped erosion area is formed during sputtering and a substrate holder on which a plurality of substrates are mounted are installed, opposed in parallel, in a manner such that center axes of the target and the substrate holder align with each other, and the substrates are mounted on the substrate holder in positions such that R3/R1 is 1.1 or smaller and R4 is R2 or greater to form thin films, where R1 is a distance from a deepest recess in the annular-shaped erosion area to the center of the target, R2 is a distance from an innermost circumference of the annular-shaped erosion area to the center of the target, R3 is a longest distance from an end of an outside diameter of a substrate to the center of the substrate holder, and R4 is a shortest distance from the end of the outside diameter of the substrate to the center of the substrate holder.
Dependencies are inferred from the claim text.