Projection lens of a microlithographic exposure system
AssigneeCarl Zeiss SMT GmbH
InventorsMichael Totzeck, Susanne Beder, Wilfried Clauss, Heiko Feldmann, Daniel Kraehmer, Aurelian Dodoc
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AssigneeCarl Zeiss SMT GmbH
InventorsMichael Totzeck, Susanne Beder, Wilfried Clauss, Heiko Feldmann, Daniel Kraehmer, Aurelian Dodoc
Estimating the term…
In some embodiments, the disclosure provides a projection lens configured to configured to image radiation from an object plane of the projection lens to an image plane of the projection lens. The projection lens can, for example, be used in a microlithographic projection exposure apparatus. The projection lens includes a last lens on the image plane side. The last lens includes at least one intrinsically birefringent material. The material can be, for example, magnesium oxide, a garnet, lithium barium fluoride and/or a spinel. The last lens can have a thickness d which satisfies the condition 0.8*y0, max<d<1.5*y0, max, where y0, max denotes the maximum distance of an object field point from the optical axis.
A projection lens having an optical axis, the projection lens configured to image radiation from an object plane of the projection lens to an image plane of the projection lens, the projection lens comprising:
A projection lens having an optical axis, the projection lens configured to image radiation from an object plane of the projection lens to an image plane of the projection lens, the projection lens comprising:
Dependencies are inferred from the claim text.