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US 2009/0021734 A1Published application
Apparatus and method for detecting suspended particles
AssigneeKabushiki Kaisha Toshiba
InventorsTaketo SHIBA, Masaaki Furuya, Masahiko Takahashi
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Abstract
An apparatus for detecting suspended particles, includes a laser source configured to emit a beam of laser light, a diameter expander configured to expand the diameter of the beam, and a distributor configured to distribute the laser light in a sheet-like space, the distributor varying the traveling direction of the laser light in continuous directions at a fixed angle with respect to a reference axis.
Claims20
An apparatus for detecting suspended particles, comprising:
- a laser source configured to emit a beam of laser light;
- a diameter expander configured to expand the diameter of the beam;
- and
- a distributor configured to distribute the laser light in a sheet-like space.
1 more element
A method for detecting suspended particles, comprising:
- expanding the diameter of a beam of laser light;
- distributing the laser light in a sheet-like space;
- and
- detecting the laser light reflected by a particle traveling in the sheet-like space.
1 more element
Dependencies are inferred from the claim text.