Method of lifting off and fabricating array substrate for liquid crystal display device using the same

A method of fabricating an array substrate for a liquid crystal display device, comprising:

• forming a gate line and a gate electrode on a substrate, the substrate having a display region and first to fourth non-display regions at periphery of the display region, the gate electrode being disposed in the display region;
• forming a data line, a data pad, a semiconductor layer, a source electrode and a drain electrode on the substrate, the data line crossing the gate line, the data pad disposed at one end of the data line and in the first non-display region, the semiconductor layer disposed over the gate electrode, the source electrode connected to the data line and disposed on the semiconductor layer, the drain electrode spaced apart from the source electrode and disposed on the semiconductor layer;
• forming an insulting material layer over an entire surface of the substrate including the data line, the data pad, the source electrode and the drain electrode;
• forming a first photoresist pattern corresponding to the source and drain electrode, and a second photoresist pattern having first and second holes, the first photoresist pattern exposing a portion of the drain electrode, the first and second holes respectively corresponding to first and second portions of the data pad;
• patterning the insulating material layer by using the first and second photoresist patterns as a patterning mask to form a passivation layer exposing the portion of the drain electrode and a first passivation pattern having first and second grooves, the first and second grooves exposing the first and second portions of the data pad, respectively;
• forming a conductive material layer over an entire surface of the substrate including the first and second photoresist patterns, the passivation layer and the a first passivation pattern;
• and
• removing the first and second photoresist patterns and the conductive material layer on the first and second photoresist patterns at the same time by a lifting off process.

A method of fabricating an array substrate for a liquid crystal display device, comprising:

• forming a gate line and a gate pad on a substrate, the gate pad disposed at one end of the gate line;
• sequentially forming a gate insulating layer, an intrinsic amorphous silicon layer, an impurity-doped amorphous silicon layer and a metal layer over an entire surface of the substrate including the gate line and the gate pad;
• patterning the metal layer, the impurity-doped amorphous silicon layer, the intrinsic amorphous silicon layer and the gate insulating layer to expose the gate pad and form a data line crossing the gate line to define a pixel region and a data pad disposed at one end of the data line;
• forming a conductive material layer over an entire surface of the substrate including the data line and the data pad;
• forming a first photoresist pattern including first and second holes and a second photoresist pattern including third and fourth holes, the first and second holes corresponding to first and second portions of the gate pad, respectively, the second and fourth holes corresponding to third and fourth portions of the data pad, respectively;
• patterning the conductive material layer using the first and second photoresist patterns as a patterning mask to form a first conductive material pattern having first and second grooves and a second conductive material pattern having third and fourth grooves, the first and second grooves exposing the first and second portions, respectively, of the gate pad, the third and fourth grooves exposing the third and fourth portions, respectively, of the data pad;
• forming a passivation layer over an entire surface of the substrate including the first and second photoresist patterns and the first, second, third and fourth grooves;
• and
• removing the first and second photoresist patterns and the passivation layer on the first and second photoresist patterns at the same time by a lifting off process.