Method and arrangement for positioning a probe card
AssigneeSUSS MicroTec Test Systems GmbH
InventorsStojan Kanev, Hans-Jurgen Fleischer, Stefan Kreissig, Jorg Kiesewetter
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AssigneeSUSS MicroTec Test Systems GmbH
InventorsStojan Kanev, Hans-Jurgen Fleischer, Stefan Kreissig, Jorg Kiesewetter
Estimating the term…
A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.
Method for positioning a probe card with probe needles, which needles have needle tips, relative to a surface of a substrate to be tested in a direction perpendicular to the surface of the substrate, a first position of the needle tips relative to the surface of the substrate being measured and stored as a separation position in such a manner that the separation point is approached in a first positioning step, which step does not measure the distance between the needle tips and the surface of the substrate, so as to produce a distance between the needle tips and the surface of the substrate, a second position of the needle tips relative to the surface of the substrate being measured and stored as a contact position in such a manner that the contact position is approached in a second positioning step, which second step does not measure the distance between the needle tips and the surface of the substrate, until the needle tips make contact with the surface of the substrate, an image of the needle tips being recorded along at least one horizontal imaging direction, which direction is essentially parallel to the surface of the substrate, and being displayed, and, when imaging the needle tips, the stored contact position is imaged or an absolute height of the needle tips which corresponds to the stored contact position is imaged, the imaged contact position or the imaged absolute height of the needle tips is changed until presentation of these positions corresponds to a height of the needle tips which is appropriate for the respective probe card or corresponds to an appropriate height of the contact position and this contact position which has been set is then stored as a new contact position or the corresponding contact position is calculated from set height of the contacts and is stored.
Arrangement for positioning a probe card with probe needles, which needles have needle tips and are arranged on the probe card such that the needles are oriented in position, comprising a substrate holder, a setting device for adjusting the substrate holder relative to the probe card, a recording device with a recording axis directed at the probe needles and essentially parallel to a surface of the substrate, the setting device including a drive device having a memory that stores a contact position and a separation position, and a display device that presents the needle tips and the stored contact position and is connected to the memory and to a recording device and has an input means which changes the contact position.
Dependencies are inferred from the claim text.