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AssigneeTokyo Electron Limited
InventorsShigekazu Komatsu, Dai Shinozaki, Katsuaki Sakamoto
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By allowing an electrical conduction between a probe and an electrode by a fritting phenomenon before inspection, simplification of circuit configuration and shortening of inspection time is achieved. A fritting circuit is formed in a probe card of an inspection apparatus for each probe pair consisting of two probes. A capacitor is connected to each fritting circuit. Each fritting circuit is connected in parallel to a power supply circuit having a charging power supply. Each capacitor is charged at one time by the power supply circuit. The probe pair is brought into contact with an electrode of a wafer, and a high-voltage is applied to the probe pair by a power charged in the capacitor, thereby achieving an electrical connection between each probe and the electrode by a fritting phenomenon. Then, an inspection of electrical characteristics is performed by using an electric inspection signal transmitted to each probe.
An inspection apparatus for inspecting an electrical characteristic of a target object by bringing a probe into contact with a terminal of the target object, the apparatus comprising:
A probe card including a plurality of probes on a surface facing a target object, for inspecting an electrical characteristic of the target object by bringing the probes into contact with a terminal of the target object, the probe card comprising:
Dependencies are inferred from the claim text.