Angular velocity sensor and manufacturing method thereof

A method of manufacturing an angular velocity sensor, comprising:

• providing a substrate made of single crystal silicon and having a tuning folk shape, the substrate including a plurality of arms and a joint section for connecting respecting ends of the arms with each other, the plurality of arms extending in parallel with each other;
• forming a barrier layer containing silicon oxide by oxidizing a surface of the plurality of the arms of the substrate;
• forming a first adhesion layer containing titanium on the barrier layer by sputtering;
• forming a first electrode layer containing platinum and at least one of titanium and titanium oxide on the first adhesion layer by sputtering;
• forming an orientation control layer on the first electrode layer by sputtering;
• forming a piezoelectric layer on the orientation control layer by sputtering;
• forming a second adhesion layer on the piezoelectric layer by sputtering or vacuum deposition;
• and
• forming a second electrode layer on the second adhesion layer by sputtering or vacuum deposition.