Solid-state imaging device, solid-state imaging apparatus and manufacturing method thereof

A solid-state imaging device, comprising:

• a lens having a modulated effective refractive index distribution by including a combination of a plurality of zone areas with a plural-stage concentric structure, the plurality of zone areas being divided, in a whole area of said lens, into line widths which are equal to or shorter than a wavelength of an incident light, and
• wherein at least one of the plurality of zone areas includes a lower light-transmitting film with a first plural-stage concentric structure and having a first line width and a first film thickness, and an upper light-transmitting film with a second plural-stage concentric structure, configured on said lower light-transmitting film, and having a second line width and a second film thickness.

A solid-state imaging apparatus, comprising:

• unit pixels that are arranged in a two-dimensional array, each unit pixel including a lens, wherein said lens has a modulated effective refractive index distribution by including a combination of a plurality of zone areas with a plural-stage concentric structure, the plurality of zone areas being divided, in a whole area of said lens, into line widths which are equal to or shorter than a wavelength of an incident light, at least one of the plurality of zone areas including:
• a lower light-transmitting film with a first plural-stage concentric structure and having a first line width and a first film thickness, and
• an upper light-transmitting film with a second plural-stage concentric structure, configured on said lower light-transmitting film, and having a second line width and a second film thickness.