Photoelectric conversion device and imaging system using photoelectric conversion device
AssigneeCanon Kabushiki Kaisha
InventorsAiko Furuichi, Shigeru Nishimura
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Abstract
A photoelectric conversion device includes photoelectric conversion elements and element isolation regions, both of which are arranged on a semiconductor substrate. The photoelectric conversion device further includes a plurality of interlayer insulation layers including a first interlayer insulation layer arranged nearest to the semiconductor substrate, and a second interlayer insulation layer arranged to cover the first interlayer insulation layer. Gaps extending from at least the second interlayer insulation layer to the first interlayer insulation layer are arranged in first and second interlayer insulation layer regions corresponding to the element isolation regions.
Claims9
A photoelectric conversion device comprising:
- a semiconductor substrate wherein a photoelectric conversion element, and an element isolation region electrically isolating the photoelectric conversion element from an element adjacent to the photoelectric conversion element are arranged;
- a plurality of interlayer insulation layers including a first interlayer insulation layer and a second interlayer insulation layer arranged to cover the first interlayer insulation layer;
- and
- a plurality of wiring layers including a wiring layer arranged nearest to the semiconductor substrate and arranged between the first and second interlayer insulation layers, wherein
- a lower refractive index region extending from the first interlayer insulation layer into the second interlayer insulation layer and having a refractive index lower than those of the first and second interlayer insulation layers, the lower refractive index region arranged in an area corresponding to the element isolation region in a plane parallel to the surface of the semiconductor substrate, and the lower refractive index region having a refractive index lower than those of the first and second interlayer insulation layers.
Dependencies are inferred from the claim text.