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US 2009/0020760 A1Published application
Methods for forming materials using micro-heaters and electronic devices including such materials
AssigneeSamsung Electronics Co., Ltd.
InventorsJunhee Choi, Andrei Zoulkarneev, SungSoo Park
Life of this patent
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Abstract
Nano-sized materials and/or polysilicon are formed using heat generated from a micro-heater, the micro-heater may include a substrate, a heating element unit formed on the substrate, and a support structure formed between the substrate and the heating element unit. Two or more of the heating element units may be connected in series.
Claims20
A method for forming a material comprising:
- applying energy to a micro-heater to heat the micro-heater;
- and
- forming a material through the heating of the micro-heater on the micro-heater,
- wherein the micro-heater has a configuration that allows two or more micro-heaters to be repeatedly connected in series.
1 more element
The method of 12, wherein the material is carbon nanotubes or zinc oxide nano-wires, and the material is formed from the material catalyst layer.
The electronic device of 18, further comprising:
- a drain electrode;
- and
- a source electrode;
- wherein the drain electrode and the source electrode intersect on a portion of the substrate at right angles and polysilicon is formed on the drain and source electrodes to form a transistor.
1 more element
Dependencies are inferred from the claim text.