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US 2009/0020738 A1Published application
Integrated circuit including force-filled resistivity changing material
AssigneeQimonda AG
InventorsThomas Happ, Jan Boris Philipp
Life of this patent
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Abstract
An integrated circuit includes a first electrode, a second electrode, and force-filled resistivity changing material electrically coupled to the first electrode and the second electrode.
Claims31
An integrated circuit comprising:
- a first electrode;
- a second electrode;
- and
- force-filled resistivity changing material electrically coupled to the first electrode and the second electrode.
1 more element
A system comprising:
- a host;
- and
- a memory device communicatively coupled to the host, the memory device comprising:
- a first electrode;
- a second electrode;
- and
- void free and organic contaminant free resistivity changing material electrically coupled to the first electrode and the second electrode.
4 more elements
A memory comprising:
- a first electrode;
- a second electrode;
- and
- void free and organic contaminant free means for storing data between the first electrode and the second electrode.
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A method for fabricating an integrated circuit, the method comprising:
- providing a preprocessed wafer including a first electrode;
- providing dielectric material including an opening exposing a portion of the first electrode over the preprocessed wafer;
- depositing resistivity changing material over the dielectric material;
- force-filling the opening with the resistivity changing material;
- and
- fabricating a second electrode over the resistivity changing material.
3 more elements
A method for fabricating a memory, the method comprising:
- providing a preprocessed wafer including a first electrode;
- providing a dielectric material layer including a pore exposing a portion of the first electrode over the preprocessed wafer;
- sputter depositing phase change material over the dielectric material layer;
- force-filling the pore with the phase change material to fill any voids within the pore;
- planarizing the phase change material to expose the dielectric material layer;
- and
- fabricating a second electrode contacting the phase change material.
4 more elements
Dependencies are inferred from the claim text.