# US 2009/0020702 A1 · Electromagnetic radiation detector and method for manufacturing such a detector

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- Number: US 2009/0020702 A1
- Document ID: US20090020702A1
- Status: Published application
- Kind: A1
- Application number: 12/170,669
- Filed: 2008-07-10
- Published: 2009-01-22
- Earliest claimed: 2007-07-20
- Assignees: Ulis
- Inventors: Michel VILAIN
- Web page: https://patentgrep.com/patent/US20090020702A1

## CPC

- G01J 5/20: using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- H10F 39/184: {Infrared image sensors}
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

This electromagnetic radiation detector comprises a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate. The distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.

## Claims

### Claim 1

A detector of electromagnetic radiation comprising a reflecting substrate and at least one detection element comprising a membrane sensitive to said radiation and suspended above the substrate, wherein the distance between the membrane and at least one detection element and the substrate is variable, said distance having a predefined spatial distribution suitable for minimizing the rapid variations of a response of the detector to the radiation in at least one predefined wavelength range.

### Claim 2 (depends on 1)

The electromagnetic radiation detector as claimed in claim 1, wherein the substrate and/or the membrane have 3D motifs.

### Claim 3 (depends on 1)

The electromagnetic radiation detector as claimed in claim 1, wherein the membrane and the substrate are substantially parallel in portions.

### Claim 4 (depends on 3)

The electromagnetic radiation detector as claimed in claim 3, wherein the distance between the membrane and the substrate is distributed between at least first and second predefined values.

### Claim 5 (depends on 3)

The electromagnetic radiation detector as claimed in claim 3, wherein the surface areas corresponding to various distance values between the membrane and the substrate are identical or different.

### Claim 6 (depends on 1)

The electromagnetic radiation detector as claimed in claim 1, wherein the membrane comprises a bolometric material sensitive to a temperature variation resulting from exposure to infrared radiation.

### Claim 7 (depends on 6)

The electromagnetic radiation detector as claimed in claim 6, wherein the membrane is sensitive to wavelengths between about 3 microns and about 14 microns.

### Claim 8 (depends on 6)

The electromagnetic radiation detector as claimed in claim 6, wherein the first and second distance values are substantially equal to 3 and 2 microns respectively.

### Claim 9 (depends on 8)

The electromagnetic radiation detector as claimed in claim 8, wherein the ratio of the area of the membrane separated from the substrate by the first distance to the area of the membrane separated from the substrate by the second distance is between about 35 and about 65 percent.

### Claim 10 (depends on 2)

The electromagnetic radiation detector as claimed in claim 2, wherein the 3D motifs are repetitive, and in that their repetition step is lower than or equal to 4 microns.

### Claim 11 (depends on 6)

The electromagnetic radiation detector as claimed in claim 6, wherein the 3D motifs are repetitive, and in that their repetition step is lower than or equal to 4 microns.

### Claim 12

A method for manufacturing an electromagnetic radiation detector, of the type comprising a step of formation of a reflecting substrate and of a membrane, of at least one detection element sensitive to a radiation, and a step of suspension of the membrane above the substrate, wherein the step of formation of the substrate and of the membrane comprises a step of creation of 3D motifs in the substrate and/or the membrane, so that the distance between the substrate and the membrane is variable in order to have a predefined spatial distribution suitable for minimizing the rapid variations of a response of the radiation detector in at least one predefined wavelength range.