Optical member, solid-state imaging device, and manufacturing method
AssigneeSony Corporation
InventorAtsushi Toda
Life of this patent
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Abstract
An optical member includes high refractive index layers having a great refractive index and low refractive index layers having a small refractive index, which are each relatively thin as compared with an optical length, disposed alternately in the lateral direction as to an optical axis. Each width of the high refractive index layers and the low refractive index layers is equal to or smaller than the wavelength order of incident light.
Claims23
An optical member, wherein high refractive index layers having a great refractive index and low refractive index layers having a small refractive index, which are each relatively thin as compared with an optical length, are disposed alternately in the lateral direction as to an optical axis;
- and wherein each width of said high refractive index layers and said low refractive index layers is equal to or smaller than the wavelength order of incident light.
An solid-state imaging device comprising:
- an optical member, wherein high refractive index layers having a great refractive index and low refractive index layers having a small refractive index, which are each relatively thin as compared with an optical length, are disposed alternately in the lateral direction as to an optical axis, and each width of said high refractive index layers and said low refractive index layers is equal to or smaller than the wavelength order of incident light;
- and
- a light reception portion configured to receive light passed through said optical member.
A manufacturing method of an optical member comprising the steps of:
- forming the films of any one of high refractive index layers having a great refractive index and low refractive index layers having a low refractive index;
- forming a plurality of opening portions by arraying in the lateral direction of said films;
- and
- embedding each of said opening portions with the others of said high refractive index layers and said low refractive index layers;
- thus manufacturing an optical member where said high refractive index layers and said low refractive index layers are disposed alternately in the lateral direction as to an optical axis.
A manufacturing method of a solid-state imaging device comprising the steps of:
- forming low refractive index layers having a small refractive index on a semiconductor substrate where a light reception portion is formed;
- forming high refractive index layers having a great refractive index on said low refractive index layers;
- forming a plurality of opening portions at positions corresponding to said light reception portions of said refractive index layers by arraying said plurality of opening portions;
- and
- embedding each of said opening portions with said low refractive index layers;
- thus manufacturing an optical member where said high refractive index layers and said low refractive index layers are disposed alternately in the lateral direction as to an optical axis, integral with said semiconductor substrate.
Dependencies are inferred from the claim text.