Micro-heaters and methods for manufacturing the same

Abstract

Example embodiments provide a micro-heater including, a substrate, at least one heating element unit provided on the substrate, the at least one heating element unit having a configuration to allow two or more heating element units to be repeatedly connected in series, and a support structure between the substrate and the at least one heating element unit to support the at least one heating element unit at a lower part of the at least one heating element unit. Example embodiments also provide a method for manufacturing a micro-heater including forming a sacrificial layer on a substrate and forming a heating element layer on the sacrificial layer, patterning the heating element layer to form at least one heating element unit, wherein the at least one heating element unit has a configuration to allow two or more heating element units to be repeatedly connected in series, etching the sacrificial layer to form a support structure to support the at least one heating element unit at a lower part of the at least one heating element unit.

Dependencies are inferred from the claim text.