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US 2009/0020399 A1Published application
Electromechanical switch and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDong-chul Kim, Ran-ju Jung, Sun-ae Seo, Chang-won Lee, Hyun-jong Chung
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Abstract
Provided is an electromechanical switch and a method of manufacturing the same. The electromechanical switch includes an elastic conductive layer that moves by the application of an electric field, wherein the elastic conductive layer includes at least one layer of graphene.
Claims21
An electromechanical switch comprising an elastic conductive layer that moves by the application of an electric field, wherein the elastic conductive layer comprises at least one layer of graphene.
A method of manufacturing an electromechanical switch, comprising:
- forming a gate electrode and a drain electrode on a base substrate, wherein the gate electrode and drain electrode are separated from each other;
- forming an elastic conductive layer having a line shape, a first end of which is supported by the base substrate, the rest of which is separated from the gate electrode and the drain electrode, and that comprises at least one layer of graphene;
- and
- forming a source electrode on the base substrate, covering the first end of the elastic conductive layer.
1 more element
Dependencies are inferred from the claim text.