Non-flammable solvents for semiconductor applications
AssigneeAir Liquide Electronics U.S. LP
InventorsZhiwen WAN, Ashutosh Misra, Ziyun Wang
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Abstract
Methods and compositions for purging and cleaning a semiconductor fabrication system are disclosed herein. In general, the disclosed methods utilize solvents comprising hydrofluoroethers. Hydrofluoroethers are non-toxic and have low moisture content, preventing heat generation from organometallic precursor hydrolysis. In an embodiment, a method of cleaning a semiconductor fabrication system comprises dissolving at least one chemical precursor used in semiconductor fabrication in at least one delivery line with a solvent to clean the at least one delivery line. The solvent generally comprises a hydrofluoroether. The methods and compositions may be used in a variety of semiconductor film deposition processes.
Claims29
A method of cleaning a semiconductor fabrication system comprising:
- flushing the semiconductor fabrication system by dissolving one or more chemical precursors used in semiconductor fabrication in one or more delivery lines with a solvent to clean the one or more delivery lines, wherein the solvent comprises a hydrofluoroether.
A method of removing one or more chemical precursors used in semiconductor fabrication from one or more delivery lines in a semiconductor fabrication system comprising:
- a) forcing a solvent containing a hydrofluoroether through the one or more delivery lines;
- and
- b) dissolving the one or more chemical precursors in the solvent to remove the one or more chemical precursors from the one or more delivery lines.
A method of preventing corrosion in one or more delivery lines in a semiconductor fabrication system comprising:
- a) using hexachlorodisilane as a chemical precursor for film deposition in the semiconductor fabrication system;
- b) flushing the one or more delivery lines with a solvent containing a hydrofluoroether;
- and
- c) dissolving the hexachlorodisilane with the solvent to remove the hexadichlorosilane from the semiconductor fabrication system and prevent corrosion.
Dependencies are inferred from the claim text.