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US 2009/0014932 A1Published application
Xy stage
AssigneeYokogawa Electric Corporation
InventorsMitsuhiro Nikaido, Yutaka Koizumi, Fumio Kaiho
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Abstract
An XY stage for controlling a position of a slider part on a lattice platen in two-dimensional directions has a plurality of the slider parts whose positions are controlled independently. The plurality of the slider parts each has: a position controlling part for controlling a position of the slider part in an X axis direction and a Y axis direction; and a yawing correcting part for correcting a yawing of the slider part around a Z axis.
Claims13
An XY stage for controlling a position of a slider part on a lattice platen in two-dimensional directions,
- the XY stage comprising
- a plurality of the slider parts whose positions are controlled independently,
- wherein the plurality of the slider parts each comprises:
- a position controlling part for controlling a position of the slider part in an X axis direction and a Y axis direction;
- and
- a yawing correcting part for correcting a yawing of the slider part around a Z axis.
3 more elements
Dependencies are inferred from the claim text.