Semiconductor device package with bump overlying a polymer layer
OwnerJoan K. Vrtis, Anthony Curtis +4inventors
InventorsJoan K. Vrtis, Anthony Curtis, Bret Trimmer, Brian King, Yuan Lu, Haluk Balkan
Life of this patent
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Abstract
A semiconductor device package, for example a flip-chip package, having a solder bump mounted above a polymer layer for use in flip-chip mounting of a semiconductor device to a circuit board. A polymer layer such as polybenzoxazole is formed overlying a wafer passivation layer. Solder bumps are attached to an under-bump metallization layer and electrically coupled to conductive bond pads exposed by openings in the wafer passivation layer.
Claims37
A semiconductor device comprising:
- a substrate having an integrated circuit formed on a front surface of the substrate and a plurality of conductive bond pads formed at the front surface for making electrical interconnections to the integrated circuit;
- a wafer passivation layer on the front surface of the substrate, wherein the wafer passivation layer has openings to expose at least a portion of the conductive bond pads;
- a polymer layer overlying the wafer passivation layer, wherein the polymer layer overlaps and contacts a portion of the top surface of the conductive bond pads and the polymer layer has openings to expose a central portion of the conductive bond pads;
- a conductive layer positioned overlying and in contact with at least a portion of the polymer layer and providing a plurality of solder bump pads, wherein the conductive layer contacts the conductive bond pads through the openings in the polymer layer;
- and
- a plurality of solder bumps, each being secured to a corresponding one of the solder bump pads.
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A semiconductor device comprising:
- a substrate having an integrated circuit formed on a front surface of the substrate and a plurality of conductive bond pads formed at the front surface for making electrical interconnections to the integrated circuit;
- a wafer passivation layer on the front surface of the substrate, wherein the wafer passivation layer has openings to expose at least a portion of the conductive bond pads;
- a polymer layer overlying the wafer passivation layer, wherein the polymer layer has openings to expose a central portion of the conductive bond pads;
- an under-bump metallization layer overlying and in contact with the polymer layer, wherein the under-bump metallization layer contacts the conductive bond pads through the openings in the polymer layer;
- a plurality of solder bumps, each being secured to a portion of the under-bump metallization layer;
- and
- wherein each portion of the under-bump metallization layer securing one of the solder bumps has a bottom surface area and wherein less than about 30% of the bottom surface area is in metal-to-metal contact with its respective conductive bond pad.
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A semiconductor device comprising:
- a substrate having an integrated circuit formed on a front surface of the substrate and a plurality of conductive bond pads formed at the front surface for making electrical interconnections to the integrated circuit;
- a wafer passivation layer on the front surface of the substrate, wherein the wafer passivation layer has openings to expose at least a portion of the conductive bond pads;
- a polymer layer overlying the wafer passivation layer, wherein the polymer layer overlaps and contacts a portion of the top surface of the conductive bond pads and has openings to expose a central portion of the conductive bond pads;
- a patterned under-bump metallization layer overlying and in contact with the polymer layer, wherein the under-bump metallization layer comprises titanium and contacts the conductive bond pads through the openings in the polymer layer;
- and
- a plurality of solder bumps, wherein at least a portion of each of the solder bumps is positioned above one of the conductive bond pads and secured to a portion of the under-bump metallization layer.
A method for forming a semiconductor device comprising a substrate having an integrated circuit formed on a front surface of the substrate and a plurality of conductive bond pads formed at the front surface for making electrical interconnections to the integrated circuit, the method comprising:
- forming a wafer passivation layer on the front surface of the substrate with openings to expose at least a portion of the conductive bond pads;
- forming a polymer layer overlying the wafer passivation layer, wherein the polymer layer overlaps and contacts a portion of the top surface of the conductive bond pads and the polymer layer has openings to expose a central portion of the conductive bond pads;
- forming a conductive layer positioned overlying and in contact with at least a portion of the polymer layer and to provide a plurality of solder bump pads, wherein the conductive layer contacts the conductive bond pads through the openings in the polymer layer;
- and
- mounting a plurality of solder bumps, each being secured to a corresponding one of the solder bump pads.
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Dependencies are inferred from the claim text.