Detector for electron column and method for detecting electrons for electron column
OwnerHo Seob Kiminventor
Life of this patent
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Abstract
In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
Claims13
1-7. (canceled)
A detector for en electron column, which is made of conductive material, has a mesh form, an arrangement structure of one or more wires, or a conductive plate shape, and is located and used above a sample.
A method of detecting electrons generated by an electron beam in an electron column, in which a detector directly detects the electrons and transmits current data from the detected electrons to an outside.
Dependencies are inferred from the claim text.