Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator

A method of manufacturing semiconductor devices, comprising:

• loading a substrate into a reactor container;
• and
• heating up the inside of the reactor container in a heating apparatus which comprises a heating element, an inner shell for supporting the heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, a partition arranged to extend from the first opening to the second opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell, and an insulator for shutting up a gap provided between the partition and the second opening, in order to process the substrate.

A method of manufacturing semiconductor devices, comprising:

• loading a substrate into a reactor container;
• and
• heating up the inside of the reactor container in a heating apparatus which comprises a heating element, an inner shell for supporting the heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, a partition arranged to extend from the first opening to the second opening or from the second opening to the first opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell, and an insulator for shutting up a gap provided between the partition and the second opening or between the partition and the first opening, in order to process the substrate.

An insulator for use in a heating apparatus including at least a heating element, an inner shell for supporting the heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, and a partition arranged to extend from the first opening to the second opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell, wherein

• the insulator is arranged to shut up a gap provided between the partition and the second opening.

An insulator for use in a heating apparatus including at least a heating element, an inner shell for supporting a heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, and a partition arranged to extend from the first opening to the second opening or from the second opening to the first opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell, wherein

• the insulator is arranged to shut up a gap provided between the partition and the second opening or between the partition and the first opening.