Film forming apparatus and method for manufacturing light emitting element
AssigneeTokyo Electron Limited
InventorsToshihisa Nozawa, Shingo Watanabe
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Abstract
A film forming apparatus is provided with a processing chamber having a substrate holding table for holding a substrate to be processed inside the container; a gas material generation unit arranged outside the processing chamber, for generating a gas material by evaporating or sublimating a film forming source material including a metal; a gas material supply unit for supplying the processing chamber with the gas material; and a transport path for transporting the gas material to the gas material supply unit from the gas material generation unit. The film forming apparatus is characterized in that a metal-containing layer is formed on an organic layer including a light emitting layer on the target substrate.
Claims14
A film forming apparatus comprising:
- a processing chamber having therein a substrate holding table for holding a substrate;
- a gas material generation unit arranged outside the processing chamber, for generating gas material by evaporating or sublimating source material containing metal;
- at least one gas material supply unit for supplying the gas material into the processing chamber;
- and
- a transport path for transporting the gas material from the gas material generation unit to the gas material supply unit,
- wherein the film forming apparatus is configured to form a metal-containing layer on an organic layer including a light emitting layer on the substrate.
A method for manufacturing a light emitting element comprising:
- a first film forming step of forming a metal-containing layer on an organic layer including a light emitting layer;
- and
- a second film forming step of forming an electrode on the metal-containing layer,
- wherein, in the first film forming step, a film is formed by supplying a gas material obtained by evaporating or sublimating a source material onto the organic layer via a transport path.
Dependencies are inferred from the claim text.