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AssigneeVon Ardenne Anlagentechnik GmbH
InventorsReinhardt BAUER, Johannes Struempfel, Andreas Heisig, Matthias Smolke, Thomas Posseckardt, Frank Hupka
Estimating the term…
In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.
Transport device, including at least one endless conveyor device guided around at least two deflection rolls, in which a monitoring device is provided on at least one deflection roll to monitor movement of the deflection roll, the monitoring device includes a first contact element connected electrically conducting to the deflection roll and arranged on the deflection roll, as well as a second contact element arranged next to the deflection roll, the first and second contact elements being arranged relative to each other, so that during each revolution of the deflection roll, electrical contact occurs between the first contact element and the second contact element, so that the electrical potential of the deflection roll is transferred to the second contact element.
Device for treatment of substrates, including at least one treatment device, as well as a transport device for transport of the substrates being treated to the treatment device, wherein the transport device includes at least one endless conveyor device guided around at least two deflection rolls, in which a monitoring device is provided on at least one deflection roll to monitor movement of deflection roll, the monitoring device includes a first contact element connected electrically conducting to the deflection roll and arranged on the deflection roll, as well as a second contact element arranged next to the deflection roll, the first and second contact elements being arranged relative to each other, so that during each revolution of the deflection roll, electrical contact occurs between the first contact element and the second contact element, so that the electrical potential of the deflection roll is transferred to the second contact element.
Dependencies are inferred from the claim text.