Sheet peeling apparatus and peeling method

A sheet peeling apparatus for peeling off a sheet being stuck on a plate-like object using an adhesive tape, comprising:

• a first peeling unit that pulls said adhesive tape along the direction across said sheet in a state stuck to the sheet to peel off the sheet at a predetermined peeling angle;
• and
• a second peeling unit that pulls said adhesive tape in a state stuck to the end portion of said sheet to peel off the sheet at a peeling angle different from said peeling angle,
• wherein said first and second peeling units are arranged to be selectively used.

A sheet peeling apparatus for peeling off a sheet being stuck to cover the surface of a semiconductor wafer having a substantially disk-like shape using an adhesive tape of a width narrower than the diameter of the sheet, comprising:

• a first peeling unit that pulls said adhesive tape along the direction across said sheet in a state stuck to the sheet to peel off the sheet at a predetermined peeling angle;
• and
• a second peeling unit that pulls said adhesive tape in a state stuck to the end portion of said sheet to peel off the sheet at a peeling angle different from said peeling angle,
• wherein said first and second peeling units are arranged to be selectively used.

A sheet peeling method of peeling off a sheet stuck on a plate-like object using an adhesive tape, the method comprising:

• a first roller capable of performing a relative movement along the external surface of said sheet;
• and a second roller disposed adjacent to the first roller and capable of relative movement along with the first roller,
• wherein, in a state that said second roller is positioned at the position opposite to the travel direction of said first roller at peeling operation, and disposed at a position further away than the first roller with respect to the surface of said sheet,
• said first and second rollers and said sheet are caused to make a relative movement simultaneously along the external surface of the sheet to peel off the sheet.

A sheet peeling method of peeling off a sheet stuck on a plate-like object using an adhesive tape, the method comprising:

• a first peeling unit that pulls said adhesive tape along the direction across said sheet in a state stuck to the sheet to peel off the sheet at a predetermined peeling angle;
• and
• a second peeling unit that pulls said adhesive tape in a state stuck to the end portion of said sheet to peel off the sheet at a peeling angle different from said peeling angle, wherein,
• said first and second peeling units are selectively used to peel off said sheet.