Micro-electro-mechanical pressure sensor

Abstract

The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. The substrate includes an acoustic cavity. The dielectric isolation layer is formed on the substrate, and the dielectric isolation layer includes a through hole corresponding to the acoustic cavity. The at least two electrodes are separately formed on the dielectric isolation layer. The vibrating membrane covers the through hole, and the vibrating membrane includes at least one carbon nanotube structure with two opposite ends. The two opposite ends of the carbon nanotube are respectively connected to at least a given one of the at least two electrodes.

Dependencies are inferred from the claim text.