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AssigneeLeybold Optics GmbH
InventorsWalter Zultzke, Markus Fuhr, Manfred Viet, Klaus Nauenburg
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The invention relates to a method for production of a coated substrate, whereby at least one functional layer is deposited on the substrate from the vapor phase by means of chemical or physical deposition of a coating material and a temporary protective layer is applied to the functional layer by means of evaporation of a salt, in particular, an alkali metal halide. The invention further relates to a coated substrate with at least one functional layer and a temporary protective layer applied to the functional layer, which comprises a salt, in particular, an alkali metal halide, preferably a salt-like alkali metal halide and more particularly sodium chloride.
A method for production of a coated substrate (1), whereby at least one functional layer (2, 3) is deposited on the substrate (1) by means of chemical or physical deposition of a coating material from the vapor phase, and a temporary protective layer (4) is applied to at least one functional layer (2, 3), characterized in that the temporary protective layer (4) is applied by means of evaporation of a salt that is easily soluble in water or in a polar or protic organic solvent and/or by means of evaporation of a compound forming a salt-like layer that is easily soluble in water or in a polar or protic organic solvent.
A method according to any of the above claims, characterized in that the temporary protective layer (4) is applied by means of evaporation using a thermally heated resistance evaporator or an electron-beam evaporator (9).
A method according to any of the above claims, characterized in that the temporary protective layer (4) is applied with a thickness of 5 nm to 100 nm, more particularly of 10 nm.
A method according to any of the above claims, characterized in that at least a first functional layer (2) comprising at least one metal or at least one metal compound is applied.
A method according to any of the above claims, characterized in that the substrate (1) is treated with a plasma beam or ion beam prior to the application of a first functional layer (2).
A method according to any of the above claims, characterized in that a second, hydrophobic and/or oleophobic functional layer (3) is applied to the substrate (1) or to the first functional layer (2).
A method according to any of the above claims, characterized in that the substrate (1) is treated in a first step
A coated substrate at least comprising one functional layer (2, 3) and a temporary protective layer (4) applied to the functional layer (2, 3), characterized in that the temporary protective layer (4) comprises a salt or a salt-like compound that are easily soluble in water or in a polar or protic organic solvent.
Dependencies are inferred from the claim text.