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US 2008/0309191 A1Published application
Mems moving platform with lateral zipping actuators
OwnerTsung-Kuan Allen Chou, Oing Mainventors
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Abstract
A MEMS platform with four actuators and four corresponding actuation electrodes. Movement of the platform in the x-y lateral plane is controlled by voltages applied to the four actuation electrodes. Other embodiments are described and claimed.
Claims7
An apparatus comprising:
- an anchor;
- a platform;
- an actuation electrode;
- and
- an actuator having a first region coupled to the platform and a second region coupled to the anchor such that there is a gap between the actuator and the actuation electrode, wherein the gap is decreasing from the first region to the second region.
2 more elements
An apparatus comprising:
- a platform;
- a first actuator having a first region coupled to the platform and a second region;
- a first actuation electrode such that a first gap is formed between the first actuator and the first actuation electrode, wherein the first gap is decreasing from the first region of the first actuator to the second region of the first actuator;
- a second actuator having a first region coupled to the platform and a second region;
- and
- a second actuation electrode such that a second gap is formed between the second actuator and the second actuation electrode, wherein the second gap is decreasing from the first region of the second actuator to the second region of the second actuator.
3 more elements
Dependencies are inferred from the claim text.