# US 2008/0304543 A1 · Temperature measuring apparatus and temperature measuring method

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- Number: US 2008/0304543 A1
- Document ID: US20080304543A1
- Status: Published application
- Kind: A1
- Application number: 12/043,654
- Filed: 2008-03-06
- Published: 2008-12-11
- Earliest claimed: 2007-03-07
- Assignees: Tokyo Electron Limited
- Inventors: Jun Abe; Tatsuo Matsudo; Chishio Koshimizu
- Web page: https://patentgrep.com/patent/US20080304543A1

## CPC

- G01J 5/02: Constructional details
- G01K 1/026: {arrangements for monitoring a plurality of temperatures, e.g. by multiplexing}
- G01K 11/125: using changes in reflectance
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00)

## Abstract

A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes an attenuator that attenuates the reference beam reflected from the reference beam reflector to thereby make an intensity thereof closer to an intensity of the measurement beam reflected from the temperature measurement object.

## Claims

### Claim 1

A temperature measuring apparatus comprising:
a light source;
a first splitter for dividing a light beam emanated from the light source into a measurement beam and a reference beam;
at least one second splitter for dividing the measurement beam coming from the first splitter into a first to an nth measuring beam;
a reference beam reflector for reflecting the reference beam coming from the first splitter;
an optical path length adjuster for adjusting an optical path length of the reference beam reflected from the reference beam reflector;
a reference beam transmitting member for transmitting the reference beam coming from the first splitter to a reference beam irradiation position from which the reference beam is irradiated onto the reference beam reflector;
a first to an nth measuring beam transmitting member for transmitting the first to the nth measuring beam coming from the second splitters to measuring beam irradiating positions from which the measurement beams are irradiated onto a first to an nth measurement points of a temperature measurement object;
a photodetector for measuring an interference between the reference beam reflected from the reference beam reflector and the first to the nth measuring beam reflected from the temperature measurement object, wherein the optical path lengths of the first to the nth measuring beam from the second splitter to the temperature measurement object are different from each other; and
an attenuator that attenuates the reference beam reflected from the reference beam reflector such that an intensity thereof becomes closer to an intensity of the measurement beam reflected from the temperature measurement object.

### Claim 2 (depends on 1)

The temperature measuring apparatus of claim 1, wherein the attenuator attenuates a light beam passing therethrough to 1/√{square root over (n)} of an original intensity thereof.

### Claim 3

A temperature measuring apparatus comprising:
a light source;
a splitter for dividing a light beam emanated from the light source into a reference beam and a first to an nth measuring beam;
a reference beam reflector for reflecting the reference beam coming from the splitter;
an optical path length adjuster for adjusting an optical path length of the reference beam reflected from the reference beam reflector;
a reference beam transmitting member for transmitting the reference beam coming from the splitter to a reference beam irradiation position from which the reference beam is irradiated onto the reference beam reflector;
a first to an nth measuring beam transmitting member for transmitting the first to the nth measuring beam coming from the splitter to measuring beam irradiating positions from which the measurement beams are irradiated onto a first to an nth measurement points of a temperature measurement object; and
a photodetector for measuring an interference between the reference beam reflected from the reference beam reflector and the first to the nth measuring beam reflected from the temperature measurement object,
wherein the optical path lengths of the first to the nth measuring beam from the splitter to the temperature measurement object are different from each other.

### Claim 4

A temperature measuring apparatus comprising:
a light source;
a first splitter for dividing a light beam emanated from the light source into a measurement beam and a reference beam;
at least one second splitter for dividing the measurement beam coming from the first splitter into a first to an nth measuring beam;
a reference beam reflector for reflecting the reference beam coming from the first splitter;
an optical path length adjuster for adjusting an optical path length of the reference beam reflected from the reference beam reflector;
a reference beam transmitting member for transmitting the reference beam coming from the first splitter to a reference beam irradiation position from which the reference beam is irradiated onto the reference beam reflector;
a first to an nth measuring beam transmitting member for transmitting the first to the nth measuring beam coming from the second splitters to measuring beam irradiating positions from which the measurement beams are irradiated onto a first to an nth measurement points of a temperature measurement object;
a photodetector for measuring an interference between the reference beam reflected from the reference beam reflector and the first to the nth measuring beam reflected from the temperature measurement object, wherein the optical path lengths of the first to the nth measuring beam from the second splitter to the temperature measurement object are different from each other; and
an AC component extractor that extracts an AC component from an output signal of the photodetector.

### Claim 5 (depends on 1)

The temperature measuring apparatus of claim 1, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus, and the first to the nth measuring beam transmitting member are arranged in the substrate processing apparatus such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate.

### Claim 6 (depends on 3)

The temperature measuring apparatus of claim 3, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus, and the first to the nth measuring beam transmitting member are arranged in the substrate processing apparatus such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate.

### Claim 7 (depends on 4)

The temperature measuring apparatus of claim 4, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus, and the first to the nth measuring beam transmitting member are arranged in the substrate processing apparatus such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate.

### Claim 8 (depends on 1)

The temperature measuring apparatus of claim 1, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus including a plurality of process chambers in each of which a process is performed on the substrate,
wherein the first to the nth measuring beam transmitting member are arranged in each of the process chambers such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate, and a plurality of the second splitters are respectively provided for the process chambers,
wherein a selector is provided between the first splitter and the second splitters for selecting one of the second splitters to be used, and
wherein the temperature measuring apparatus is capable of measuring a temperature of the substrate in the process.

### Claim 9 (depends on 4)

The temperature measuring apparatus of claim 4, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus including a plurality of process chambers in each of which a process is performed on the substrate,
wherein the first to the nth measuring beam transmitting member are arranged in each of the process chambers such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate, and a plurality of the second splitters are respectively provided for the process chambers,
wherein a selector is provided between the first splitter and the second splitters for selecting one of the second splitters to be used, and
wherein the temperature measuring apparatus is capable of measuring a temperature of the substrate in the process.

### Claim 10 (depends on 1)

The temperature measuring apparatus of claim 1, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus including a plurality of process chambers in each of which a process is performed on the substrate,
wherein the first to the nth measuring beam transmitting member are arranged in each of the process chambers such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate, and a plurality of the second splitters are respectively provided for the process chambers,
wherein a third splitter is provided between the first splitter and the second splitters, which divides the measurement beam coming from the first splitter into divided beams to thereby output the divided beams to the second splitters, respectively, and
wherein the temperature measuring apparatus is capable of measuring a temperature of the substrate in the process.

### Claim 11 (depends on 4)

The temperature measuring apparatus of claim 4, wherein the temperature measurement object is a substrate to be processed by a substrate processing apparatus including a plurality of process chambers in each of which a process is performed on the substrate,
wherein the first to the nth measuring beam transmitting member are arranged in each of the process chambers such that the first to the nth measuring beam are irradiated onto a plurality of measurement points in a surface of the substrate, and a plurality of the second splitters are respectively provided for the process chambers,
wherein a third splitter is provided between the first splitter and the second splitters, which divides the measurement beam coming from the first splitter into divided beams to thereby output the divided beams to the second splitters, respectively, and
wherein the temperature measuring apparatus is capable of measuring a temperature of the substrate in the process.

### Claim 12

A temperature measuring method, comprising:
irradiating a first to an nth measuring beam whose optical path lengths are different from each other onto respective measurement points of a temperature measurement object while irradiating a reference beam onto a reference beam reflector;
attenuating the reference beam reflected from the reference beam reflector such that an intensity thereof becomes closer a total intensity of the first to the nth measuring beam by using an attenuator;
measuring interferences between the attenuated reference beam reflected from the reference beam reflector and the first and the nth measuring beam reflected from the temperature measurement object while moving the reference beam reflector in one direction to thereby change an optical path length of the reference beam reflected from the reference beam reflector; and
measuring temperatures at the respective measurement points of the temperature measurement object based on the results of measuring the interferences.

### Claim 13 (depends on 12)

The temperature measuring method of claim 12, wherein the attenuator attenuates a light beam passing therethrough to 1/√{square root over (n)} of an original intensity thereof.