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US 2008/0301592 A1Published application
Methodology for automated design of vertical parallel plate capacitors
AssigneeInternational Business Machines Corporation
InventorSteven H. Voldman
Life of this patent
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Abstract
Apparatus and program product for designing vertical parallel plate (VPP) capacitor structures in which the capacitor plates in different conductive layers of the capacitor stack have a different physical spacing. The methodology optimizes the physical spacing of the plates in each conductive layer to achieve a targeted electrostatic discharge protection level and, thereby, supply electrostatic discharge robustness.
Claims9
An apparatus comprising:
- a graphical user interface for inputting one or more design parameters for a vertical parallel plate (VPP) capacitor;
- a processor coupled with the graphical user interface;
- and
- program code configured to be executed by the processor to define a parameterized cell representing a vertical parallel plate capacitor by automatically determining a number of metallization levels each containing a plurality of plates of the VPP capacitor and a material for the plates in each of the metallization layers to collectively satisfy the one or more design parameters and, after the number of metallization levels and the material for the plates in each of the metallization layers are determined, to automatically optimize a physical spacing between adjacent pairs of the plates in each of the metallization layers to achieve a targeted electrostatic discharge protection level.
1 more element
A program product, comprising:
- program code configured to define a parameterized cell representing a vertical parallel plate capacitor by automatically determining a number of metallization levels containing plates of a vertical parallel plate capacitor and a material for the plates in each of the metallization layers to collectively satisfy one or more design parameters and, after the number of metallization levels and the material for the plates in each of the metallization layers are determined, to automatically optimize a physical spacing between adjacent pairs of the plates in each of the metallization layers to achieve a targeted electrostatic discharge protection level;
- and
- a computer readable medium bearing the program code.
Dependencies are inferred from the claim text.