Method for wafer analysis with artificial neural network and system thereof
AssigneeKing Yuan Electronics Co., Ltd.
InventorMing-Chin TSAI
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Abstract
A method for wafer analysis with artificial neural network and the system thereof are disclosed. The method of the system of the present invention has several steps, including: first of all, providing a test unit for wafer test and generating a plurality of test data; next, transmitting the test data to a processing unit for transferring to output data; then, comparing the output data with predictive value and modifying bias and making the output data close to the predictive value, and repeating the steps mentioned above to train this system; finally, analyzing wafers by the trained system. Using this system to analyze wafers not only saves time, but also reduces manpower and the risk resulting from artificial analysis.
Claims40
A system for wafer analysis, including:
- a processing unit for receiving test data from a test unit;
- and
- a learning and comparing of artificial neural network unit which connects with said processing unit and receives instructions from said processing unit to compute said test data, and compares computation with data from a database for making results of systematic analysis approach to results of artificial analysis
- whereby said system could save time of wafer analysis.
A system for wafer analysis, including:
- a processing unit for receiving test data from a test unit
- a learning and comparing of artificial neural network unit which connects with said processing unit and receives instructions from said processing unit to compute said test data;
- and
- a database unit which connects with said processing unit for saving data, and provides said saving data to said learning and comparing of artificial neural network unit to compare for making results of systematic analysis approach to results of artificial analysis;
- whereby said system could save time of wafer analysis.
A method for wafer analysis utilizing artificial neural network system, including:
- (a) providing a test unit for wafer test and generating a plurality of test data;
- (b) transmitting said test data to a processing unit for transferring to output data;
- (c) comparing said output data with predictive value and modifying bias and making the output data close to said predictive value, and repeating the steps mentioned above to train this system;
- and
- (d) analyzing wafers by the trained system;
- whereby said method could save time of wafer analysis.
A computer-readable medium having computer-executable instructions for performing a method for wafer analysis utilizing artificial neural network system, comprising:
- (a) providing a test unit for wafer test and generating a plurality of test data;
- (b) transmitting said test data to a processing unit for transferring to output data;
- (c) comparing said output data with predictive value and modifying bias and making the output data close to said predictive value, and repeating the steps mentioned above to train this system;
- and
- (d) analyzing wafers by the trained system;
- whereby said method could save time of wafer analysis.
Dependencies are inferred from the claim text.