Antireflective Coating Composition Comprising Fused Aromatic Rings
AssigneeAZ Electronic Materials USA Corp.
InventorsFrancis Houlihan, David Abdallah, M. Dalil Rahman, Douglas McKenzie, Ruzhi Zhang, Allen G. Timko, Wookyu Kim, Ping-Hung Lu
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Abstract
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.
Claims24
An organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moiety in the backbone of the polymer.
Dependencies are inferred from the claim text.