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US 2008/0291373 A1Published application
LCoS DISPLAY WITH A COLOR PIXEL ARRAY AND FABRICATION METHOD THEREOF
AssigneeUnited Microelectronics Corp.
InventorYan-Hsiu Liu
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Abstract
A method of fabricating an LCOS display with a color pixel array contains disposing reflective layers between various color filter layers. The reflective layers are used as etching stop layers between color filter layers so that etching processes are capable of carrying out to define the patterns of the color filter layers in different sub-pixels for forming the color pixel array.
Claims53
A fabrication method of a liquid crystal on silicon (LCOS) display with a color pixel array, comprising:
- providing a semiconductor substrate;
- successively forming a first reflective layer, a first color filter layer, a second reflective layer, and a second color filter layer on the semiconductor substrate;
- forming a first patterned layer with a first exposed region on the second color filter layer;
- removing portions of the second color filter layer and the second reflective layer exposed by the first patterned layer so as to form a first opening in the second color filter layer;
- removing the first patterned layer;
- and
- forming a first planarized layer in the first opening for planarizing the surface of the semiconductor substrate.
4 more elements
A fabrication method of an LCOS display with a color pixel array, comprising:
- providing a semiconductor substrate;
- successively forming a first reflective layer, a first color filter layer, a second reflective layer, a second color filter layer, a third reflective layer, and a third color filter layer on the semiconductor substrate;
- forming a first patterned layer on the third color filter layer, the first patterned layer comprising a first exposed region;
- performing a first etching process to remove portions of the third color filter layer and the third reflective layer exposed by the first patterned layer so as to form a first opening in the third color filter layer;
- forming a second patterned layer on the third color filter layer, the second patterned layer comprising a second exposed region;
- performing a second etching process to remove portions of the third color filter layer and the third reflective layer exposed by the second patterned layer so as to form a second opening;
- and
- forming a first planarized layer in the first opening or the second opening on the semiconductor substrate.
5 more elements
An LCOS display with a color pixel array comprising:
- a semiconductor substrate with a plurality of sub-pixels defined thereon to form a color pixel array;
- a first reflective layer and a first color filter layer disposed on the semiconductor substrate;
- a second reflective layer and a second color filter layer disposed on the second color filter layer, the second color filter layer and the second reflective layer comprising a first opening corresponding to a first sub-pixel on the semiconductor substrate;
- and
- a third reflective layer and a third color filter layer disposed on the second color filter layer, the third color filter layer and the third reflective layer comprising a second opening corresponding to the first sub-pixel and a second sub-pixel on the semiconductor substrate.
2 more elements
Dependencies are inferred from the claim text.